Optimization of PZT (52/48) through Improved Platinum Metallization, Use of a PbTiO3 Seed Layer, and Fine Tuning of Annealing Conditions for Applications in Multilayer Actuator MEMS Technology
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Optimization of PZT (52/48) through Improved Platinum Metallization, Use of a PbTiO3 Seed Layer, and Fine Tuning of Annealing Conditions for Applications in Multilayer Actuator MEMS Technology